F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdPbc-1122 4 Adding SDM Mappings —

4  Adding SDM Mappings — SDM mappings added to part two of this document are considered document additions and are balloted as such

Originally published by ASTM International as ASTM F399-00a

previously published July 2005

• Support equipment interconnects

装置の有用性

F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdPbc-1122 4 Adding SDM Mappings —1 Purpose 1. 1 This Guide suggests formats for the facilities data package (FDP) typically required for the installation of manufacturing equipment in a facility. The data and formats suggested by this Guide complement other SEMI Standards (e. g., SEMI E6), and include the utility requirements and connections information needed for installing manufacturing equipment (including support equipment) and connecting that equipment to the facility and